Characterization of tellurium dioxide thin films obtained through the Pechini method
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2022
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Journal of Sol-Gel Science and Technology
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Tellurium dioxide (TeO2) thin films were deposited on silicon substrates through the Pechini method, after which they were
heat treated at different temperatures. The heat treatment temperatures were defined from the thermogravimetry-differential
scanning calorimetry (TG-DSC) data of the precursor gel. The effects of the heat treatment on the structural properties were
investigated through X-ray diffraction (XRD), atomic force microscopy, and Raman spectroscopy. The TG-DSC data
showed four different weight loss steps due to the reduction of telluric acid to tellurium, the removal of the excess ethylene
glycol, the decomposition of citric acid, and the degradation of polyester. The XRD and Raman data showed the presence of
the γ- and α-TeO2 phases in the films treated at 400–500 °C. Lattice parameters of the observed crystalline phases were
determined by Rietveld refinement, with which it was possible to evaluate the crystallite size and microstrain using the
Williamson-Hall method. The heat treatment temperature directly influenced the crystallite size and the surface roughness of
the films, which showed similar behaviors with the temperature.
Como referenciar
BATALIOTTI, MURILO D.; COSTA, FRANCINE B.; MINUSSI, FERNANDO B.; ARAUJO, EUDES B.; LIMA, NELSON B. de; MORAES, JOAO C.S. Characterization of tellurium dioxide thin films obtained through the Pechini method. Journal of Sol-Gel Science and Technology, v. 103, n. 2, p. 378-385, 2022. DOI: 10.1007/s10971-022-05844-7. Disponível em: http://repositorio.ipen.br/handle/123456789/33228. Acesso em: 18 Apr 2024.
Esta referência é gerada automaticamente de acordo com as normas do estilo IPEN/SP (ABNT NBR 6023) e recomenda-se uma verificação final e ajustes caso necessário.