Residual stress in TiN thin films studied by the grazing incidence X-ray diffraction method

GOMEZ, A.G.RECCO, A.A.C.MARTINEZ, L.G.2014-12-172014-12-172014-12-172014-12-172007GOMEZ, A.G.; RECCO, A.A.C.; MARTINEZ, L.G. Residual stress in TiN thin films studied by the grazing incidence X-ray diffraction method. <b>Activity Report 2007</b>. Disponível em: http://repositorio.ipen.br/handle/123456789/23037.http://repositorio.ipen.br/handle/123456789/23037openAccesstitanium nitridesthin filmsresidual stressesx-ray diffractionResidual stress in TiN thin films studied by the grazing incidence X-ray diffraction methodCapítulo de livroActivity Report 2007https://orcid.org/0000-0001-7707-7821