Residual stress in TiN thin films studied by the grazing incidence X-ray diffraction method

Página do item simplificado
dc.contributor.authorGOMEZ, A.G.pt_BR
dc.contributor.authorRECCO, A.A.C.pt_BR
dc.contributor.authorMARTINEZ, L.G.pt_BR
dc.coverageNacionalpt_BR
dc.date.accessioned2014-12-17T12:25:42Zpt_BR
dc.date.accessioned2014-12-17T12:54:48Z
dc.date.available2014-12-17T12:25:42Zpt_BR
dc.date.available2014-12-17T12:54:48Z
dc.date.issued2007pt_BR
dc.identifier.citationGOMEZ, A.G.; RECCO, A.A.C.; MARTINEZ, L.G. Residual stress in TiN thin films studied by the grazing incidence X-ray diffraction method. <b>Activity Report 2007</b>. Disponível em: http://repositorio.ipen.br/handle/123456789/23037.
dc.identifier.orcidhttps://orcid.org/0000-0001-7707-7821
dc.identifier.urihttp://repositorio.ipen.br/handle/123456789/23037pt_BR
dc.publisherLNLS: Campinas, 2007pt_BR
dc.rightsopenAccesspt_BR
dc.subjecttitanium nitridespt_BR
dc.subjectthin filmspt_BR
dc.subjectresidual stressespt_BR
dc.subjectx-ray diffractionpt_BR
dc.titleResidual stress in TiN thin films studied by the grazing incidence X-ray diffraction methodpt_BR
dc.title.livroActivity Report 2007pt_BR
dc.typeCapítulo de livropt_BR
dspace.entity.typePublication
ipen.autorLUIS GALLEGO MARTINEZ
ipen.codigoautor397
ipen.contributor.ipenauthorLUIS GALLEGO MARTINEZ
ipen.date.recebimento11-01pt_BR
ipen.identifier.ipendoc16268pt_BR
ipen.type.genreCapítulo
relation.isAuthorOfPublicationd024d136-878b-4d31-bb7e-c1cb06324cfb
relation.isAuthorOfPublication.latestForDiscoveryd024d136-878b-4d31-bb7e-c1cb06324cfb
sigepi.autor.atividadeMARTINEZ, L.G.:397:32:Npt_BR
Pacote Original
Agora exibindo 1 - 1 de 1
Imagem de Miniatura
Nome:
16268.pdf
Tamanho:
132.95 KB
Formato:
Adobe Portable Document Format
Baixar
Coleções
Capítulos