Development of a dynamic interferometric focusing system for femtosecond laser machining

Abstract

Taking advantage of the inherent characteristics of femtosecond laser used for machining, we developed an interferometric system able to evaluate and correct the focal position with an accuracy of a few microns, implementing a technique based on low coherence interferometry. This approach measures at the exact spot that the laser is machining, in real time, and is sensitive to any sample that acts as a scatterer to the wavelength in use. The experimental evaluation was divided in two steps: in the first a system based on a superluminescent LED was mounted to check the viability and develop the controlling software; in the second part a setup was mounted employing a femtosecond laser, and several kinds of samples using the active focus control, among which the results obtained with glass sample and a bovine tooth are meticulously described in this paper. The system was able to improve the performance in both samples, keeping them in the confocal region for an extended positioning range, resulting in better engraving by the laser.