Focus tracking system for femtosecond laser machining using low coherence interferometry
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We designed a real time, single-laser focus tracking system using low coherence properties of the
machining femtosecond laser itself in order to monitor and correct the sample position relative to the
focal plane. Using a Michelson Interferometer, the system collects data arising from part of the beam
backscattered at the ablation spot. The data is analyzed by a custom software for position correction
(employing an XYZ automated translation stage). With the focus tracking enabled we were able to etch
channels with a stable cross-section profile on a bovine tooth with relief amplitude tens of times greater
than the Rayleigh length of the system, keeping the sample inside the confocal parameter during most
of the processing time. Moreover, the system is also capable of monitoring crater depth evolution
during the ablation process, allowing for material removal assessment.
Como referenciar
RAELE, MARCUS P.; DE PRETTO, LUCAS R.; ROSSI, WAGNER de; VIEIRA JUNIOR, NILSON D.; SAMAD, RICARDO E. Focus tracking system for femtosecond laser machining using low coherence interferometry. Scientific Reports, v. 9, p. 1-8, 2019. DOI: 10.1038/s41598-019-40749-6. Disponível em: http://repositorio.ipen.br/handle/123456789/29988. Acesso em: 26 Mar 2026.
Esta referência é gerada automaticamente de acordo com as normas do estilo IPEN/SP (ABNT NBR 6023) e recomenda-se uma verificação final e ajustes caso necessário.