Influence of oxygen atmosphere in the annealing of HfO2 thin films studied by perturbed angular correlation spectroscopy
Carregando...
Data
Data de publicação
2016
Orientador
Título da Revista
ISSN da Revista
Título do Volume
É parte de
É parte de
É parte de
É parte de
INTERNATIONAL CONFERENCE ON HYPERFINE INTERACTIONS AND THEIR APPLICATIONS
Exportar
Resumo
The thin films of HfO2 have been grown by dual ion beam sputtering (DIBS) on transparent
quartz substrates (grade silica) and silicon wafers. The major benefits of the DIBS process
are the increased packing density of the deposited films which makes them more bulk-like,
the improved adhesion resulting from the mixing of the materials at the interfaces between
each layer, and the reduction of the high tensile stress in the layers. Deposition conditions
were adjusted to obtain polycrystalline as well as amorphous films. In this study the time
differential perturbed angular correlation (PAC) spectroscopy was used to study the
influence of oxygen atmosphere in the annealing of the HfO2 thin film. The PAC method is
based on the hyperfine interaction of nuclear moments of the probe with extra nuclear
magnetic fields or electric field gradients (EFGs). In the case of quadrupolar interaction, the
experimental measurement gives the quadrupolar frequency νQ with respective distribution
δ as well as the asymmetry parameter η of EFG. The presence of the 180Hf isotope in natural
hafnium allows the possibility of using 181Ta as a probe nucleus formed by irradiating the
samples with neutrons via 180Hf(n,γ)181Hf reaction. After irradiation, samples were annealed
in oxygen atmosphere at different temperatures. The γ-γ PAC measurements were then
carried out using a standard set up with four conical BaF2 detector scintillators with a time
resolution of 0.6 ns (FWHM). Results show a structural transition from monoclinic to
tetragonal in the annealed samples.
Como referenciar
CAVALCANTE, FABIO H. de M.; SALES, TATIANE S.N.; DAY, TRAVIS; LEITE NETO, OSMAR F.S.; PEREIRA, LUCIANO F.D.; SAXENA, RAJENDRA N.; CARBONARI, ARTUR W.; MENONI, CARMEN. Influence of oxygen atmosphere in the annealing of HfO2 thin films studied by perturbed angular correlation spectroscopy. In: TEMST, KRISTIAAN (ed.); VANTOMME, ANDRE (ed.); COTTENIER, STEFAAN (ed.); PEREIRA, LINO (ed.). In: INTERNATIONAL CONFERENCE ON HYPERFINE INTERACTIONS AND THEIR APPLICATIONS, July 3-8, 2016, Leuven, Belgium. Abstract... Leuven, Belgium: Instituut voor Kern- en Stralingsfysica, 2016. Disponível em: http://repositorio.ipen.br/handle/123456789/28085. Acesso em: 26 Mar 2026.
Esta referência é gerada automaticamente de acordo com as normas do estilo IPEN/SP (ABNT NBR 6023) e recomenda-se uma verificação final e ajustes caso necessário.