Multiple diffraction simulation in the study of epitaxial layers

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dc.contributor.authorCOSTA, C.A.B.S.pt_BR
dc.contributor.authorCARDOSO, L.P.pt_BR
dc.contributor.authorMAZZOCCHI, V.L.pt_BR
dc.contributor.authorPARENTE, C.B.R.pt_BR
dc.coverageInternacionalpt_BR
dc.creator.eventoINTERNATIONAL CONFERENCE ON THE SCIENCE AND TECHNOLOGY OF DEFECT CONTROL IN SEMICONDUCTORSpt_BR
dc.date.accessioned2014-11-17T17:39:07Zpt_BR
dc.date.accessioned2014-11-18T17:47:47Zpt_BR
dc.date.accessioned2015-04-02T01:15:24Z
dc.date.available2014-11-17T17:39:07Zpt_BR
dc.date.available2014-11-18T17:47:47Zpt_BR
dc.date.available2015-04-02T01:15:24Z
dc.date.eventoSept. 17-22, 1989pt_BR
dc.identifier.citationCOSTA, C.A.B.S.; CARDOSO, L.P.; MAZZOCCHI, V.L.; PARENTE, C.B.R. Multiple diffraction simulation in the study of epitaxial layers. In: INTERNATIONAL CONFERENCE ON THE SCIENCE AND TECHNOLOGY OF DEFECT CONTROL IN SEMICONDUCTORS, Sept. 17-22, 1989, Yokohama, Japan. DOI: <a href="https://dx.doi.org/10.1016/B978-0-444-88429-9.50092-6">10.1016/B978-0-444-88429-9.50092-6</a>. Disponível em: http://repositorio.ipen.br/handle/123456789/14855.
dc.identifier.doi10.1016/B978-0-444-88429-9.50092-6
dc.identifier.urihttp://repositorio.ipen.br/handle/123456789/14855pt_BR
dc.local.eventoYokohama, Japanpt_BR
dc.rightsopenAccess
dc.subjectsemiconductor materialspt_BR
dc.subjectlayerspt_BR
dc.subjectepitaxypt_BR
dc.subjectx-ray diffractionpt_BR
dc.subjectsimulationpt_BR
dc.titleMultiple diffraction simulation in the study of epitaxial layerspt_BR
dc.typeTexto completo de eventopt_BR
dspace.entity.typePublication
ipen.autorCARLOS BENEDICTO RAMOS PARENTE
ipen.autorVERA LUCIA MAZZOCCHI
ipen.autorLISANDRO P. CARDOSO
ipen.codigoautor370
ipen.codigoautor52
ipen.codigoautor3600
ipen.contributor.ipenauthorCARLOS BENEDICTO RAMOS PARENTE
ipen.contributor.ipenauthorVERA LUCIA MAZZOCCHI
ipen.contributor.ipenauthorLISANDRO P. CARDOSO
ipen.date.recebimento91-12pt_BR
ipen.event.datapadronizada1989pt_BR
ipen.identifier.ipendoc03898pt_BR
ipen.type.genreArtigo
relation.isAuthorOfPublication6d68d835-c08b-42a3-8d41-79ded1a1e5e2
relation.isAuthorOfPublication3d27ef8f-9468-4483-a21e-3790f370a01c
relation.isAuthorOfPublication33b36e4f-3f2a-4866-840b-30abf8599758
relation.isAuthorOfPublication.latestForDiscovery33b36e4f-3f2a-4866-840b-30abf8599758
sigepi.autor.atividadeCOSTA, C.A.B.S.:-1:-1:Spt_BR
sigepi.autor.atividadeCARDOSO, L.P.:3600:-1:Npt_BR
sigepi.autor.atividadeMAZZOCCHI, V.L.:52:-1:Npt_BR
sigepi.autor.atividadePARENTE, C.B.R.:370:-1:Npt_BR

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