Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition

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dc.contributor.authorGOMEZ, A.G.pt_BR
dc.contributor.authorRECCO, A.A.C.pt_BR
dc.contributor.authorLIMA, N.B.pt_BR
dc.contributor.authorMARTINEZ, L.G.pt_BR
dc.contributor.authorTSCHIPTSCHIN, A.P.pt_BR
dc.contributor.authorSOUZA, R.M.pt_BR
dc.coverageInternacionalpt_BR
dc.date.accessioned2014-07-15T13:40:05Zpt_BR
dc.date.accessioned2014-07-30T11:50:55Z
dc.date.available2014-07-15T13:40:05Zpt_BR
dc.date.available2014-07-30T11:50:55Z
dc.date.issued2010pt_BR
dc.format.extent3228-3233pt_BR
dc.identifier.citationGOMEZ, A.G.; RECCO, A.A.C.; LIMA, N.B.; MARTINEZ, L.G.; TSCHIPTSCHIN, A.P.; SOUZA, R.M. Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition. <b>Surface and Coatings Technology</b>, v. 204, n. 20, p. 3228-3233, 2010. Disponível em: http://repositorio.ipen.br/handle/123456789/4707.
dc.identifier.fasciculo20pt_BR
dc.identifier.issn0257-8972pt_BR
dc.identifier.orcidhttps://orcid.org/0000-0001-7707-7821
dc.identifier.orcidhttps://orcid.org/0000-0002-6444-9224
dc.identifier.urihttp://repositorio.ipen.br/handle/123456789/4707pt_BR
dc.identifier.vol204pt_BR
dc.relation.ispartofSurface and Coatings Technologypt_BR
dc.rightsopenAccessen
dc.subjecttitanium nitridespt_BR
dc.subjectthin filmspt_BR
dc.subjectresidual stressespt_BR
dc.subjectsputteringpt_BR
dc.subjectx-ray diffractionpt_BR
dc.titleResidual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during depositionpt_BR
dc.typeArtigo de periódicopt_BR
dspace.entity.typePublication
ipen.autorLUIS GALLEGO MARTINEZ
ipen.autorNELSON BATISTA DE LIMA
ipen.codigoautor397
ipen.codigoautor550
ipen.contributor.ipenauthorLUIS GALLEGO MARTINEZ
ipen.contributor.ipenauthorNELSON BATISTA DE LIMA
ipen.date.recebimento10-08pt_BR
ipen.identifier.fi2.141pt_BR
ipen.identifier.ipendoc15551pt_BR
ipen.identifier.iwosWoSpt_BR
ipen.range.fi1.500 - 2.999
ipen.type.genreArtigo
relation.isAuthorOfPublicationd024d136-878b-4d31-bb7e-c1cb06324cfb
relation.isAuthorOfPublication92984f2d-b6bd-4cd9-950a-e1105bf78d83
relation.isAuthorOfPublication.latestForDiscovery92984f2d-b6bd-4cd9-950a-e1105bf78d83
sigepi.autor.atividadeLIMA, N.B.:550:730:Npt_BR
sigepi.autor.atividadeMARTINEZ, L.G.:397:730:Npt_BR
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