Initial microstructural development of surface oxidized layer during silicon nitride oxidation

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dc.contributor.authorMORAIS, D.S.pt_BR
dc.contributor.authorBRESSIANI, A.H.A.pt_BR
dc.coverageNacionalpt_BR
dc.creator.evento16th MEETING OF THE BRAZILIAN SOCIETY FOR ELECTRON MICROSCOPYpt_BR
dc.date.accessioned2014-11-19T11:59:40Zpt_BR
dc.date.accessioned2014-11-19T14:03:55Zpt_BR
dc.date.accessioned2015-04-01T13:13:00Z
dc.date.available2014-11-19T11:59:40Zpt_BR
dc.date.available2014-11-19T14:03:55Zpt_BR
dc.date.available2015-04-01T13:13:00Z
dc.date.eventoSeptember 1-5, 1997pt_BR
dc.format.extent124-125pt_BR
dc.identifier.citationMORAIS, D.S.; BRESSIANI, A.H.A. Initial microstructural development of surface oxidized layer during silicon nitride oxidation. In: 16th MEETING OF THE BRAZILIAN SOCIETY FOR ELECTRON MICROSCOPY, September 1-5, 1997, Caxambu, MG. <b>Abstract...</b> p. 124-125. Disponível em: http://repositorio.ipen.br/handle/123456789/22659.
dc.identifier.urihttp://repositorio.ipen.br/handle/123456789/22659pt_BR
dc.local.eventoCaxambu, MGpt_BR
dc.rightsopenAccesspt_BR
dc.subjectmicrostructurept_BR
dc.subjectsilicon nitridespt_BR
dc.subjectoxidationpt_BR
dc.subjectaluminium oxidespt_BR
dc.subjectrare earth compoundspt_BR
dc.subjectx-ray diffractionpt_BR
dc.subjectscanning electron microscopypt_BR
dc.subjectx-ray spectroscopypt_BR
dc.subjectsilicon oxidespt_BR
dc.subjectyttrium silicatespt_BR
dc.titleInitial microstructural development of surface oxidized layer during silicon nitride oxidationpt_BR
dc.typeResumo de eventos científicospt_BR
dspace.entity.typePublication
ipen.autorANA HELENA DE ALMEIDA BRESSIANI
ipen.autorDANIEL SANTOS MORAIS
ipen.codigoautor96
ipen.codigoautor2102
ipen.contributor.ipenauthorANA HELENA DE ALMEIDA BRESSIANI
ipen.contributor.ipenauthorDANIEL SANTOS MORAIS
ipen.date.recebimento98-03pt_BR
ipen.event.datapadronizada1997pt_BR
ipen.identifier.ipendoc06153pt_BR
ipen.notas.internasAbstractpt_BR
ipen.type.genreResumo
relation.isAuthorOfPublication04d834e7-faee-4461-8fa7-5e5071ec48cc
relation.isAuthorOfPublication96b73032-866f-4b4e-be81-4f9e6c7d3713
relation.isAuthorOfPublication.latestForDiscovery96b73032-866f-4b4e-be81-4f9e6c7d3713
sigepi.autor.atividadeMORAIS, D.S.:2102:-1:Spt_BR
sigepi.autor.atividadeBRESSIANI, A.H.A.:96:-1:Npt_BR

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